Project Examples
Ultra Precision Processes
- Combined laser / focused on beam processing
- Miniaturisation of plasma processes
- High speed fine feature creation
- Nano-imprint, micrometre embossing, resist application and curing
- Diamond machining of large scale multi-material substrates
Ultra Precision Machines
- Energy beam monitoring technologies
- Control system integration of plasma, laser, imprint, etc
- Process alignment, thermal management, vibration suppression systems
- Systems for adopting nano imprint/embossing in ultra precision m/cs
- Rapid in-process quality control systems for pattern recognition, feature size, shape and distribution analysis, tool shape/beam monitoring
- In situ process feedback techniques
- Institute for Manufacturing
- 17 Charles Babbage Road
- Cambridge CB3 0FS
