Project Examples

Ultra Precision Processes

  • Combined laser / focused on beam processing
  • Miniaturisation of plasma processes
  • High speed fine feature creation
  • Nano-imprint, micrometre embossing, resist application and curing
  • Diamond machining of large scale multi-material substrates 


Ultra Precision Machines

  • Energy beam monitoring technologies
  • Control system integration of plasma, laser, imprint, etc
  • Process alignment, thermal management, vibration suppression systems
  • Systems for adopting nano imprint/embossing in ultra precision m/cs
  • Rapid in-process quality control systems for pattern recognition, feature size, shape and distribution analysis, tool shape/beam monitoring
  • In situ process feedback techniques
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